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    Text: EDD NGTE5: UN LE55 DRAWING ND.: D T H E R W I5 E 5 P E E IF IE D , TD LERAN EE5 ARE ± .010" REV. 32A7191F E .2 5 4 m m I A FLANGE: EDPPER I/4 HD SUBSTRATE: ALUMINUM NITRIDE EUVER: ALUMINA TAB: BERYLLIUM EG PPER PER A5TM B H 4 RE S IS TIV E FILM: THIN FILM


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    PDF 32A7191F 07-F04R2 R/IB/07 UISCL05ED 2Y194