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DSAEDA000104901.pdf
Manufacturer
Cascade Microtech
Partial File Text
APS/SPS200TESLA 200 mm Fully-Automated On-Wafer Probing Solution for High-Power Devices DATA SHEET The APS/SPS200TESLA is the industryâs ï¬rst fully-automated on-wafer probing solution focuse
Datasheet Type
Original
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scfm 50 10 kv