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    DSAZSAA00014782.pdf

    • Skyworks Solutions
    • PLASMA ETCH INDUCED SURFACE DAMAGE AND ITS IMPACTS ON GaAs SCHOTTKY DIODES Hong Shen*, Peter Dai, and Ravi Ramanathan Skyworks Solutions, Inc., 2427 Hillcrest Drive, Newbury Park, CA 91320 Email: h
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    Plasma Etch Induced Surface Damage and Its Impacts on GaAs Schottky Diodes

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