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DSA00256074.pdf
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AWM3000 Series Mass flow sensor for gases FEATURES · Ranges 0...30 to 0...±1000 sccm1 or 0...0.5 to 0...2 "H2O (0...1.25 to 0...5 mbar) · 1...5 V, 1...3.75 V, 4...20 mA output · Actual mass fl
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"Flow Sensor"
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