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    DSAZSAA00014761.pdf

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    • Copper Interconnect on GaAs pHEMT by Evaporation Process Kezia Cheng Skyworks Solutions Inc. 20 Sylvan Road, Woburn, MA. kezia.cheng@skyworksinc.com (781) 241-2821 Keywords: … pHEMT, Copper, Evap
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