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DSASW00419401.pdf
Manufacturer
X-FAB Semiconductor Foundries
Partial File Text
MEMS Process Surface Micromachining Process for Inertial Sensors MIXED-SIGNAL FOUNDRY EXPERTS XM-SC Process Schematic cross section TC pad Metal line Top cap (TC) Sensor pad G
Datasheet Type
Original
ECAD Model
DSASW00419401.pdf preview
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