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DASF0018588.pdf
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Partial File Text
193nm CD shrinkage under SEM: modeling the mechanism Andrew Habermas1, Dongsung Hong1, Matthew Ross2, William Livesay2 Cypress Semiconductor, 2401 East 86th St, Bloomington, MN 55425 2 Electron Vi
Datasheet Type
Original
ECAD Model
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User Tagged Keywords
AR237J
D9000
ellipsometer
PAR710
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