Please enter a valid full or partial manufacturer part number with a minimum of 3 letters or numbers

    AR237J Search Results

    AR237J Datasheets Context Search

    Catalog Datasheet
    Type
    Document Tags
    PDF

    sartorius

    Abstract: AR237J PAR710 D9000 ellipsometer photoresist
    Contextual Info: 193nm CD shrinkage under SEM: modeling the mechanism Andrew Habermas1, Dongsung Hong1, Matthew Ross2, William Livesay2 Cypress Semiconductor, 2401 East 86th St, Bloomington, MN 55425 2 Electron Vision Corp., 10119 Carroll Canyon Road, San Diego, CA 92131-1109l


    Original     		193nm 92131-1109l 248nm sartorius AR237J PAR710 D9000 ellipsometer photoresist PDF